APPLICATIONSWafergard? III NF Micro XL In-line Gas Filters?Applications
- Ultrapure gas lines
- High temperature applications
- New fab construction
- Dynamic-pressure applications
- Inert and reactive gases
SPECIFICATIONS
Drawings
Performance Data
Product Specifications
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| Materials |
Filter element |
Sintered nickel membrane filter |
| ? |
Housing |
Electropolished VAR316L stainless steel housing |
| Downstream cleanliness |
Particles |
<0.03 particles/liter (<1 particle/ft3) >0.01 μm |
| ? |
Volatiles |
Volatile outgassing of H2O, O2, and THC is below detectable limits (by RGA and FID at room temperature) |
| Removal rating |
≥0.0015 μm |
| Surface finsh interior |
≤5 μin Ra |
| Helium leak rating |
Qualified |
2 × 10-10?atm-cc/sec. |
| ? |
Tested |
1 × 10-9?atm-cc/sec. |
| Maximum operating conditions: |
Maximum inlet pressure |
20 MPa (200 bar, 2900 psid) at 20°C (68oF) |
| ? |
Design pressure |
20 MPa (200 bar, 2900 psid) at 20°C (68oF) |
| ? |
Maximum forward/reverse differential pressure |
1 MPa (10 bar, 150 psid) |
| ? |
Maximum operating temperature |
Inert gases |
400°C (725°F) @ 35 bar (500 psi) |
| ? |
? |
Corrosive and reactive gases |
50°C (122°F) @ 70 bar (1000 psi) |
| Warranty |
5 year |
| Particle retention |
Greater than 99.9999999% (9 LRV) removal of all particles at 15 slpm |
| Flow rating |
Refer to performance data |
PART NUMBERS
Wafergard? III NF Micro XL In-line Gas Filters?Part Numbers
| PART NUMBER |
FITTING SIZE AND TYPE |
LENGTH |
| WG3NS8RR2 |
1/4" Gasket seal (compatible with VCR fitting) male inlet/outlet |
84.1 mm (3.31") |
| WG3NS8SL2 |
1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet, short Version |
50.8 mm (2.00") |
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